Omschrijving

YKE joins the visit of department Elektrotechniek to ASML, we will also meet young ASML members in the new ASML experience center. 10 places available! If full contact Toon Lamers, see details below.

Power electronics keeps ASML systems going!

EUV systems and power electronics
Currently ASML is rolling out its newest products with the Extreme Ultraviolet lithography (EUVL) capability for volume production at the 7 and 5 nm nodes. Enabling the next step in the IC-roadmap. The TWINSCAN system contains an advanced EUV light source and all-reflective lens assemblies. This visit focusses on the design and implementation of the power electronics in the TWINSCAN system. The challenge is to deal with high power as well as high reliability in a very complex high precision environment.

Burnout induced by cosmic radiation
An example of the challenges that are encountered in high power applications is lack of reliability caused by single event burnout (SEB) induced by cosmic radiation. Increasing the bus voltage in high power application has reached is limit. When switching frequency dictates the use of MOSFET devices, the supply voltage will be limited to around 700 V by SEB. There is a strong correlation with the voltage stress over the switching device. At TU/e (together with ASML) work is done to design and test a multilevel converter to lower the voltage stress as described in the paper “Flying Capacitor Resonant Pole Inverter Topology with Reduced Switch Voltage Stress” (see reference below).

Experience center and Young ASML
A general impression of ASML technology and systems will be given during a tour of the experience center. Special attention for the role of new, young employees (Young ASML) from all over the world.

Excursion full, but still want to join?
Send an email to Toon Lamers, so he can put you on a reserve list.

Locatie

ASML Building 7

Organisator

Young KIVI Engineers

Naam en contactgegevens voor informatie

Toon Lamers

t.lamers@kivi.nl