Description

Mapper, 'that other lithography machine builder', has been developing the electron beam technique used to etch webs on wafers for 18 years. The big advantage is that no (expensive) masks are needed. Technically extremely interesting and challenging. The thread of the tour is the mechanical and mechatronic challenges of a High Tech machine builder to achieve an advanced, reliable and economically interesting machine.

15:00 Arrival and reception
15:15 Introduction MAPPER technology and organisation - Paul Verschoor (Recruiter)
16:00 Mechatronics in MAPPER Tool - Paul Scheffers (Design Leader)
17:00 Tour and drinks.
18:00: Closing

Speaker(s)

ing. Paul Verschoor and ir. Paul Scheffers

Location

Mapper Lithograpy

Computerlaan 15, 2628 XK Delft

Organiser

Mechanics

Name and contact details for information

ir. Gerard Hegemans, 079-363 4230, or via the e-mail address below

gerard@comsol.com